CYPRIAN EMEKA UZOH
NIGERIAN INVENTOR WITH 130 PATENTS
COMPILED BY MOLLY UZOH


Invention # 54 in the list earned him Inventor of the Year 2006 because the technology in question came alive in quite a number of industrial and consumer electronics including mobile phones, computers, cameras, camcorders, etc. Since Emeka was working for IBM Microelectronics Division during the invention, the patent technically belongs to IBM however, the plagues was still given to Emeka to keep because he is the key inventor and the award came along when he has already left IBM.

In general, Emeka has over 170 patents worldwide but he has only 130 issued in the United States and a few more that are pending approval in the US Patent and Trademark Office (USPTO). The ownership of Emeka's 130 patents span across IBM, ASM, NuTool, Nouvellus and SolorPower.
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|  Cyprian Emeka Uzoh  Invention # 54 in the list earned him Inventor of the Year 2006 because the technology in question came alive in quite a number of industrial and consumer electronics including mobile phones, computers, cameras, camcorders, etc. Since Emeka was working for IBM Microelectronics Division during the invention, the patent technically belongs to IBM however, the plagues was still given to Emeka to keep because he is the key inventor and the award came along when he has already left IBM.  In general, Emeka has over 170 patents worldwide but he has only 130 issued in the United States and a few more that are pending approval in the US Patent and Trademark Office (USPTO). The ownership of Emeka's 130 patents span across IBM, ASM, NuTool, Nouvellus and SolorPower. | | | | PAT. NO. | | Title | | | 1 | 7,704,880 |  | Method of forming contact layers on substrates | | | 2 | 7,670,473 |  | Workpiece surface influencing device designs for electrochemical mechanical processing and method of using the same | | | 3 | RE40,983 |  | Method to plate C4 to copper stud | | | 4 | 7,572,354 |  | Electrochemical processing of conductive surface | | | 5 | 7,503,830 |  | Apparatus for reduction of defects in wet processed layers | | | 6 | 7,491,308 |  | Method of making rolling electrical contact to wafer front surface | | | 7 | 7,476,304 |  | Apparatus for processing surface of workpiece with small electrodes and surface contacts | | | 8 | 7,456,501 |  | Semiconductor structure having recess with conductive metal | | | 9 | 7,416,975 |  | Method of forming contact layers on substrates | | | 10 | 7,378,004 |  | Pad designs and structures for a versatile materials processing apparatus | | | 11 | 7,329,335 |  | Device providing electrical contact to the surface of a semiconductor workpiece during processing | | | 12 | 7,311,811 |  | Device providing electrical contact to the surface of a semiconductor workpiece during processing | | | 13 | 7,309,413 |  | Providing electrical contact to the surface of a semiconductor workpiece during processing | | | 14 | 7,309,406 |  | Method and apparatus for plating and polishing semiconductor substrate | | | 15 | 7,282,124 |  | Device providing electrical contact to the surface of a semiconductor workpiece during processing | | | 16 | 7,250,104 |  | Method and system for optically enhanced metal planarization | | | 17 | 7,244,347 |  | Method and system to provide electrical contacts for electrotreating processes | | | 18 | 7,238,092 |  | Low-force electrochemical mechanical processing method and apparatus | | | 19 | 7,211,174 |  | Method and system to provide electrical contacts for electrotreating processes | | | 20 | 7,204,917 |  | Workpiece surface influencing device designs for electrochemical mechanical processing and method of using the same | | | 21 | 7,201,829 |  | Mask plate design | | | 22 | 7,195,700 |  | Method of electroplating copper layers with flat topography | | | 23 | 7,195,696 |  | Electrode assembly for electrochemical processing of workpiece | | | 24 | 7,189,146 |  | Method for reduction of defects in wet processed layers | | | 25 | 7,147,766 |  | Chip interconnect and packaging deposition methods and structures | | | 26 | 7,122,473 |  | Edge and bevel cleaning process and system | | | 27 | 7,115,510 |  | Method for electrochemically processing a workpiece | | | 28 | 7,097,755 |  | Electrochemical mechanical processing with advancible sweeper | | | 29 | 6,979,393 |  | Method for plating copper conductors and devices formed | | | 30 | 6,974,769 |  | Conductive structure fabrication process using novel layered structure and conductive structure fabricated thereby for use in multi-level metallization | | | 31 | 6,969,456 |  | Method of using vertically configured chamber used for multiple processes | | | 32 | 6,946,716 |  | Electroplated interconnection structures on integrated circuit chips | | | 33 | 6,946,066 |  | Multi step electrodeposition process for reducing defects and minimizing film thickness | | | 34 | 6,943,112 |  | Defect-free thin and planar film processing | | | 35 | 6,942,780 |  | Method and apparatus for processing a substrate with minimal edge exclusion | | | 36 | 6,936,154 |  | Planarity detection methods and apparatus for electrochemical mechanical processing systems | | | 37 | 6,932,896 |  | Method and apparatus for avoiding particle accumulation in electrodeposition | | | 38 | 6,905,588 |  | Packaging deposition methods | | | 39 | 6,884,334 |  | Vertically configured chamber used for multiple processes | | | 40 | 6,867,136 |  | Method for electrochemically processing a workpiece | | | 41 | 6,866,763 |  | Method and system monitoring and controlling film thickness profile during plating and electroetching | | | 42 | 6,861,354 |  | Method and structure to reduce defects in integrated circuits and substrates | | | 43 | 6,852,630 |  | Electroetching process and system | | | 44 | 6,852,208 |  | Method and apparatus for full surface electrotreating of a wafer | | | 45 | 6,837,979 |  | Method and apparatus for depositing and controlling the texture of a thin film | | | 46 | 6,821,409 |  | Electroetching methods and systems using chemical and mechanical influence | | | 47 | 6,815,354 |  | Method and structure for thru-mask contact electrodeposition | | | 48 | 6,797,132 |  | Apparatus for plating and polishing a semiconductor workpiece | | | 49 | 6,780,772 |  | Method and system to provide electroplanarization of a workpiece with a conducting material layer | | | 50 | 6,777,338 |  | Edge and bevel cleaning process and system | 51 | 6,773,576 |  | Anode assembly for plating and planarizing a conductive layer | 52 | 6,768,203 |  | Open-bottomed via liner structure and method for fabricating same | 53 | 6,716,084 |  | Carrier head for holding a wafer and allowing processing on a front face thereof to occur | 54 | 6,709,562 |  | Method of making electroplated interconnection structures on integrated circuit chips | 55 | 6,695,962 |  | Anode designs for planar metal deposits with enhanced electrolyte solution blending and process of supplying electrolyte solution using such designs | 56 | 6,692,588 |  | Method and apparatus for simultaneously cleaning and annealing a workpiece | 57 | 6,685,814 |  | Method for enhancing the uniformity of electrodeposition or electroetching | 58 | 6,666,959 |  | Semiconductor workpiece proximity plating methods and apparatus | 59 | 6,649,523 |  | Method and system to provide material removal and planarization employing a reactive pad | 60 | 6,630,059 |  | Workpeice proximity plating apparatus | 61 | 6,612,915 |  | Work piece carrier head for plating and polishing | 62 | 6,610,190 |  | Method and apparatus for electrodeposition of uniform film with minimal edge exclusion on substrate | 63 | 6,600,230 |  | Seedlayer for plating metal in deep submicron structures | 64 | 6,582,579 |  | Methods for repairing defects on a semiconductor substrate | 65 | 6,572,982 |  | Electromigration-resistant copper microstructure | 66 | 6,569,783 |  | Graded composition diffusion barriers for chip wiring applications | 67 | 6,497,800 |  | Device providing electrical contact to the surface of a semiconductor workpiece during metal plating | 68 | 6,492,262 |  | Process and structure for an interlock and high performance multilevel structures for chip interconnects and packaging technologies | 69 | 6,482,307 |  | Method of and apparatus for making electrical contact to wafer surface for full-face electroplating or electropolishing | 70 | 6,478,936 |  | Anode assembly for plating and planarizing a conductive layer | 71 | 6,465,376 |  | Method and structure for improving electromigration of chip interconnects | 72 | 6,437,440 |  | Thin film metal barrier for electrical interconnections | 73 | 6,429,519 |  | Wiring structures containing interconnected metal and wiring levels including a continuous, single crystalline or polycrystalline conductive material having one or more twin boundaries | 74 | 6,413,854 |  | Method to build multi level structure | 75 | 6,413,403 |  | Method and apparatus employing pad designs and structures with improved fluid distribution | 76 | 6,413,388 |  | Pad designs and structures for a versatile materials processing apparatus | 77 | 6,409,904 |  | Method and apparatus for depositing and controlling the texture of a thin film | 78 | 6,406,608 |  | Apparatus to monitor and add plating solution to plating baths and controlling quality of deposited metal | 79 | 6,399,496 |  | Copper interconnection structure incorporating a metal seed layer | 80 | 6,380,628 |  | Microstructure liner having improved adhesion | 81 | 6,372,081 |  | Process to prevent copper contamination of semiconductor fabs | 82 | 6,355,153 |  | Chip interconnect and packaging deposition methods and structures | 83 | 6,354,916 |  | Modified plating solution for plating and planarization and process utilizing same | 84 | 6,352,623 |  | Vertically configured chamber used for multiple processes | 85 | 6,344,129 |  | Method for plating copper conductors and devices formed | 86 | 6,339,258 |  | Low resistivity tantalum | 87 | 6,337,218 |  | Method to test devices on high performance ULSI wafers | 88 | 6,337,151 |  | Graded composition diffusion barriers for chip wiring applications | 89 | 6,333,560 |  | Process and structure for an interlock and high performance multilevel structures for chip interconnects and packaging technologies | 90 | 6,333,120 |  | Method for controlling the texture and microstructure of plated copper and plated structure | 91 | 6,331,237 |  | Method of improving contact reliability for electroplating | 92 | 6,328,872 |  | Method and apparatus for plating and polishing a semiconductor substrate | 93 | 6,297,140 |  | Method to plate C4 to copper stud | 94 | 6,291,885 |  | Thin metal barrier for electrical interconnections | 95 | 6,274,935 |  | Copper wire-bonding pad | 96 | 6,270,646 |  | Electroplating apparatus and method using a compressible contact | 97 | 6,261,426 |  | Method and apparatus for enhancing the uniformity of electrodeposition or electroetching | 98 | 6,258,717 |  | Method to produce high quality metal fill in deep submicron vias and lines | 99 | 6,258,707 |  | Triple damascence tungsten-copper interconnect structure | 100 | 6,251,528 |  | Method to plate C4 to copper stud | | | | | | |
101 | 6,251,251 |  | Anode design for semiconductor deposition | 102 | 6,235,406 |  | Copper film including laminated impurities | 103 | 6,234,870 |  | Serial intelligent electro-chemical-mechanical wafer processor | 104 | 6,228,231 |  | Electroplating workpiece fixture having liquid gap spacer | 105 | 6,217,734 |  | Electroplating electrical contacts | 106 | 6,193,861 |  | Apparatus and method to enhance hole fill in sub-micron plating | 107 | 6,181,012 |  | Copper interconnection structure incorporating a metal seed layer | 108 | 6,180,505 |  | Process for forming a copper-containing film | 109 | 6,168,693 |  | Apparatus for controlling the uniformity of an electroplated workpiece | 110 | 6,140,234 |  | Method to selectively fill recesses with conductive metal | 111 | 6,126,806 |  | Enhancing copper electromigration resistance with indium and oxygen lamination | 112 | 6,123,825 |  | Electromigration-resistant copper microstructure and process of making | 113 | 6,117,784 |  | Process for integrated circuit wiring | 114 | 6,114,937 |  | Integrated circuit spiral inductor | 115 | 6,113,769 |  | Apparatus to monitor and add plating solution of plating baths and controlling quality of deposited metal | 116 | 6,113,759 |  | Anode design for semiconductor deposition having novel electrical contact assembly | 117 | 6,103,096 |  | Apparatus and method for the electrochemical etching of a wafer | 118 | 6,090,710 |  | Method of making copper alloys for chip and package interconnections | 119 | 6,071,388 |  | Electroplating workpiece fixture having liquid gap spacer | 120 | 6,066,030 |  | Electroetch and chemical mechanical polishing equipment | 121 | 6,063,506 |  | Copper alloys for chip and package interconnections | 122 | 6,056,869 |  | Wafer edge deplater for chemical mechanical polishing of substrates | 123 | 6,054,329 |  | Method of forming an integrated circuit spiral inductor with ferromagnetic liner | 124 | 5,933,753 |  | Open-bottomed via liner structure and method for fabricating same | 125 | 5,930,669 |  | Continuous highly conductive metal wiring structures and method for fabricating the same | 126 | 5,911,619 |  | Apparatus for electrochemical mechanical planarization | 127 | 5,884,990 |  | Integrated circuit inductor | 128 | 5,807,165 |  | Method of electrochemical mechanical planarization | 129 | 5,793,272 |  | Integrated circuit toroidal inductor | 130 | 5,755,859 |  | Cobalt-tin alloys and their applications for devices, chip interconnections and packaging | |
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